Steady-state micro-bunching accelerator light source

Based on the laser manipulation of electron beam, steady-state micro-bunching (SSMB) mechanism promises an bunch length six orders magnitude smaller than that in a conventional storage ring. With combination strong coherent characteristic radiation from and high repetition rate ring, high-average-power, narrow-band with wavelengths ranging THz to soft X-ray can be expected SSMB Such novel light source provide unprecedented opportunities for accelerator photon science industry applications like extreme ultraviolet (EUV) lithography. In this paper, concept its potential, progress proof-of-principle experiment, key physics issues technical challenges Tsinghua SSMB-EUV potential revolutionary influence scientific research EUV lithography are all reviewed. Some important results achieved by us also presented.